基于 L型轮辐结构膜片的窄频光纤F-P 声波传感器研究
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TH741

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国家自然科学基金 ( 11404054)、 河北省自然科学基金 ( F2019501025, F2020501040 )、 中央高校基本科研业务费专项资金(2023GFZD002)项目资助


Study on narrow-frequency fiber-optic F-P acoustic wave sensor based on L-shaped spoke structure diaphragm
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    摘要:

    光纤声传感器被广泛应用在工业、医疗等领域。 为了提高光纤 F-P 声传感器的性能,本文提出了一种 L 型轮辐结构的 F-P 传感膜片。 膜片的厚度为 15 μm、梁宽度为 0. 5 mm、中心膜片的半径为 1 mm。 膜片由激光加工技术在 304 不锈钢上刻蚀 而成。 实验对 1 000 Hz 下的传感器灵敏度进行研究,将传感器应用于光声池共振频率为 1 600 Hz 的光声光谱气体检测系统 中,并实现对 50~ 100×10 -6 的乙炔(C2H2 )气体浓度测量。 实验结果表明,该传感器在 1 000 Hz 下的声压灵敏度为 25. 4 nm/ Pa, 传感器可实现的最小可探测声压(MDP)为 38. 2 μPa / Hz 1/ 2@ 1 kHz,声压信噪比为 76. 8 dB。 实验所得到的光声光谱二次谐波 信号的峰值与乙炔浓度呈现良好的线性关系,乙炔浓度的响应度为 1. 8 pm/ 10 -6 。 该传感器在光声光谱等单频声信号检测领域 具有广泛的应用前景。

    Abstract:

    Fiber optic acoustic sensors are widely used in industry, medical and other fields. In order to improve the performance of fiberoptic Fabry-Perot acoustic sensors, a L-shaped spoke structure Fabry-Perot sensing diaphragm is proposed in this work. The thickness of the diaphragm is 15 μm, the width of the beam is 0. 5 mm, and the radius of the center diaphragm is 1 mm. The diaphragm is etched on 304 stainless steel by laser processing technology. In the experiment, the sensitivity of the sensor at 1 000 Hz was investigated, and the sensor was applied to a photoacoustic spectroscopic gas detection system with a photoacoustic cell resonance frequency of 1 600 Hz, and measurement of acetylene (C2H2 ) gas concentration from 50~ 100×10 -6 was achieved. The experimental results indicate that the sound pressure sensitivity of the sensor is 25. 4 nm/ Pa at 1 000 Hz, the minimum detectable sound pressure (MDP) achievable by the sensor is 38. 2 μPa / Hz 1/ 2@ 1 kHz, and the acoustic pressure signal-to-noise ratio is 76. 8 dB. The peak of the second harmonic signal of the photoacoustic spectroscopy obtained from the experiment shows a good linear relationship with the acetylene concentration, and the response of the acetylene concentration is 1. 8 pm/ 10 -6 . The sensor has a wide range of applications in the field of single-frequency acoustic signal detection, such as photoacoustic spectroscopy.

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王巧云,闻 妲,王纪龙,严重越,朱子恒.基于 L型轮辐结构膜片的窄频光纤F-P 声波传感器研究[J].仪器仪表学报,2024,45(5):110-117

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  • 在线发布日期: 2024-09-14
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