基于d33模式的压电式多维力传感器性能研究
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中北大学极限环境光电动态测试技术与仪器全国重点实验室太原030051

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TH86

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Research on the performance of piezoelectric multi-dimensional force sensor based on d33 mode
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State key Laboratory of Extreme Environment Optoelectronic Dynamic Measurement Technology and Instrument, North University of China, Taiyuan 030051, China

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    摘要:

    随着现代制造业、机器人技术、精密测量等领域飞速发展,多维力传感器对精准测量多方向力的需求日益凸显。针对提高机械臂和复杂机械系统中力控制与反馈精确性问题,开展关于压电式多维力传感器的研究。基于压电陶瓷的d33模式设计一种可精确测量X、Y、Z这3个方向力的压电式多维力传感器。传感器采用立方体结构,压电片分别与X、Y、Z轴垂直放置,实现多维力独立测量及自解耦。在COMSOL Multiphysics中对其参数和网格进行设置,模拟分析在不同方向施加载荷时整体结构的应力分布和变形,并结合微机控制电子万能试验机、传感器和信号采集设备,建立传感器三维测量系统,实现三维力的测量与分析。研究表明,各加载方向的力可通过合理设计传递路径准确作用于目标压电片,且可测试0~500 N法向力(Z方向)及0~200 N剪切力(X、Y方向)。所设计传感器具有较好动态响应能力、良好灵敏度、高精方向性及较稳定重复性,其中Z方向灵敏度0.080 V/N,X方向灵敏度0.110 V/N,Y方向灵敏度0.113 V/N,且各方向串扰均<0.2%。本研究在多维力测量领域具有广阔应用前景,为多维力传感器设计与优化提供重要实验数据和理论支持。

    Abstract:

    With the rapid development of modern manufacturing, robotics, precision measurement and other fields, the demand for multi-dimensional force sensors to accurately measure multi-directional forces has become increasingly prominent. Research on piezoelectric multi-dimensional force sensors has been initiated to address the problem of improving the accuracy of force control and feedback in robot arms and complex mechanical systems. Based on the d33 mode of piezoelectric ceramics, this paper designs a piezoelectric multi-dimensional force sensor that can accurately measure forces in the X, Y, and Z directions. The sensor adopts a cubic structure, and the piezoelectric sheets are placed vertically to the X, Y, and Z axes, respectively to achieve independent measurement and self-decoupling of multi-dimensional forces. The parameters and meshes are set in COMSOL Multiphysics to simulate and analyze the stress distribution and deformation of the overall structure when loads are applied in different directions. A three-dimensional sensor measurement system is established by combining a microcomputer-controlled electronic universal testing machine, sensors, and signal acquisition equipment to achieve three-dimensional force measurement and analysis. The study shows that the force in each loading direction can be accurately applied to the target piezoelectric sheet through a reasonably designed transfer path, and it is able to test the normal force of 0~500 N (Z direction) and the shear force of 0~200 N (X and Y directions). The designed sensor has good dynamic response capability, high sensitivity, precise directional resolution high-precision directionality and relatively stable repeatability, with a sensitivity of 0.080 V/N in the Z direction, 0.110 V/N in the X direction, and 0.113 V/N in the Y direction, and crosstalk in each direction is less than 0.2%. It has a broad application prospect in the field of multi-dimensional force measurement, providing important experimental data and theoretical support for the design and optimization of multi-dimensional force sensors.

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李芬,侯晓娟,张欣,富肖严,何剑.基于d33模式的压电式多维力传感器性能研究[J].仪器仪表学报,2025,46(5):32-39

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  • 在线发布日期: 2025-08-12
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