基于参考环的透镜多参数差动共焦测量方法
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北京理工大学光电学院北京100081

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TH741TN249

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A differential confocal comprehensive measurement method of lens geometry multi-parameters based on reference ring positioning
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School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China

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    摘要:

    单个透镜的几何参数误差累积效应对光学系统整体的成像质量影响尤其突出,在透镜的多种几何参数中,中心厚度、楔形误差和中心偏差对成像质量的影响较为显著。针对光学透镜中心厚度、中心偏差、楔形误差等几何参数测量及面形关联表征的难题,提出了一种基于参考环辅助定位的差动共焦光学透镜几何多参数综合测量方法。该方法利用激光差动共焦测量曲线零点与传感器焦点精确对应的特性,实现了光学透镜单一表面的高精度定焦测量;通过共基准参考环辅助定位方法,实现了光学透镜双侧表面翻转测量过程中的精确定位;通过参考环姿态配准方法,实现了光学透镜表面关联配准及面形重构,最终实现了光学透镜几何多参数的综合测量及评价。通过对透镜的几何多参数进行综合测量,可以有针对性地对系统整体进行优化设计,减少了重复定位误差和累积误差,有助于提高系统的精度,改善成像质量,进而提升光学系统的整体综合性能。经实验验证,该方法对光学透镜厚度的测量误差<1.200 μm,中心偏差的测量误差优于1.000 μm,楔形误差<0.002°,该方法为光学透镜几何多参数测量提供了一种新的技术途径。

    Abstract:

    The cumulative effect of geometric parameter errors of a single lens has a particularly prominent impact on the overall imaging quality of the optical system. Among various geometric parameters of the lens, the center thickness, wedge error and center deviation have a more significant influence on the imaging quality. Among various geometric parameters of the lens, the center thickness, wedge error, and center deviation have a significant influence on the imaging quality. To address the difficult problems in measuring geometric parameters such as thickness, center deviation, and wedge error of optical lenses and characterizing the correlation of multi-surface shapes, this article proposes a differential confocal optical lens geometric multi-parameter comprehensive measurement method based on reference ring-assisted positioning. This method uses the characteristics of the precise correspondence between the zero point of the laser differential confocal measurement curve and the focus of the sensor to achieve high-precision fixed-focus measurement of a single surface of the optical lens. Through the common reference ring-assisted positioning method, the precise positioning of the optical lens during the flip measurement of the double-sided surface is achieved. Through the reference ring attitude alignment method, the position correlation alignment and surface reconstruction of the double-sided surface of the optical lens are achieved. Finally, the comprehensive measurement and evaluation of the optical lens geometric multi-parameters are achieved. By conducting comprehensive measurements of multiple geometric parameters of the lens, the overall system can be optimized in a targeted manner, reducing repetitive positioning errors and cumulative errors. This helps improve the system′s accuracy, enhances imaging quality, and ultimately boosts the overall comprehensive performance of the optical system. Experimental verification shows that the measurement error of the optical lens thickness is less than 1.200 μm, the measurement error of the center deviation is better than 1.000 μm, and the wedge error is less than 0.002°. This method provides a new technical approach for the measurement of optical lens geometric multi-parameters.

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刘金晨,刘昱含,应荣辉,邱丽荣,赵维谦.基于参考环的透镜多参数差动共焦测量方法[J].仪器仪表学报,2025,46(5):81-89

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  • 在线发布日期: 2025-08-12
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