基于粒子群-梯度下降混合优化的物镜偏振像差测量研究
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1.南京信息工程大学物理与光电工程学院南京210044; 2.南京信息工程大学江苏省气象光子学与光电探测国际合作 联合实验室南京210044; 3.南京信息工程大学大气光电探测与信息融合国家级重点实验室培育建设点南京210044; 4.南京信息工程大学江苏省大气光电智能感知技术工程研究中心南京210044

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TH741.4

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国家自然科学基金(42375127)项目资助


Measurement of polarization aberration of a high numerical aperture objective based on hybrid particle swarm optimization and gradient-descend algorithms
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1.School of Physics and Optoelectronic Engineering, Nanjing University of Information Science and Technology, Nanjing 210044, China; 2.Jiangsu International Joint Laboratory on Meteorological Photonics and Optoelectronic Detection, Nanjing University of Information Science & Technology, Nanjing 210044, China; 3.State Key Laboratory Cultivation Base of Atmospheric Optoelectronic Detection and Information Fusion, Nanjing University of Information Science & Technology, Nanjing 210044, China; 4.Jiangsu Engineering Research Center for Intelligent Optoelectronic Sensing Technology of Atmosphere, Nanjing University of Information Science & Technology, Nanjing 210044, China

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    摘要:

    受到镀膜及材料双折射、内部应力的影响,高数值孔径光学系统不可避免存在一定的偏振像差,使得系统的成像质量与入射光偏振态相关。现有偏振像差测量技术一般装置较为复杂,测量不便,效率较低。针对此问题,提出了使用往返式光路进行测量,利用偏振分辨波前测量技术从聚焦光场的强度分布反演显微物镜的Jones矩阵,降低系统复杂度。首先,基于光线追迹及标量衍射理论建立了数值计算模型,模拟聚焦光场不同轴向位置处的强度分布;其次,将复振幅反演转化为最优化问题,进而利用粒子群及梯度下降混合优化算法建立了反演模型,通过优化表征偏振像差的Zernike多项式系数使得预测与目标强度分布之间的偏差最小化,实现光学系统Jones矩阵的反演;再次,基于数值模拟测试了给定偏振像差时模型的反演结果,Jones矩阵元素反演结果与目标值符合较好,误差值<10-3;最后,实验测量了商用高数值孔径显微物镜的偏振像差,反演了Zernike多项式系数,预测与目标强度分布保持一致。理论与实验结果表明,所提出的算法能够有效获得显微物镜的偏振像差,且具有结构简单、操作方便的特点,有望为高数值孔径光学系统的制造检测提供一个新的技术手段。

    Abstract:

    Due to the effects of coating, material birefringence, and internal stress, polarization aberration is ubiquitous in high numerical aperture (NA) optical systems. In this case, the imaging quality is highly dependent on the polarization of incident light. Conventional methods to characterize the polarization aberration suffer from complex systems and measurement inconvenience. To address this problem, a back-and-forth optical setup is proposed to measure polarization-resolved wavefront and reconstruct the Jones matrix of the objective in this work, which helps reduce the system complexity. Firstly, a numerical model based on the ray tracing method and scalar diffraction theory is established to simulate intensity distributions of focused light fields at different axial positions. Secondly, the problem of wavefront retrieval is transformed into an optimization problem, and an inverse model is formulated for retrieving the Jones matrix utilizing hybrid particle swarm optimization and gradient descent algorithms, where the deviation between modelled and target intensity distributions is minimized by optimizing the coefficients of Zernike polynomials accounting for the polarization aberration. Thirdly, numerical simulation is implemented to examine the model accuracy under predefined polarization aberrations, showing a good agreement between reconstructed and target Jones matrix elements with retrieval errors less than 10-3. Finally, experimental measurements of polarization aberration are performed on a commercial high-NA microscope objective to retrieve the coefficients of Zernike polynomials, where modelled intensity distributions agree well with the target. Theoretical and experimental results demonstrate that the proposed algorithm can effectively retrieve the objective′s polarization aberration with the advantages of a simple configuration and user-friendly operation. It is anticipated that this work provides a novel technical approach for manufacturing and characterizing high-NA optical systems.

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裴世鑫,郑改革,曹兆楼.基于粒子群-梯度下降混合优化的物镜偏振像差测量研究[J].仪器仪表学报,2025,46(8):198-205

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  • 在线发布日期: 2025-11-07
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