多频磁场耦合的单码道绝对式直线时栅位移传感器
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1.重庆理工大学机械工程学院重庆400054; 2.重庆理工大学 机械检测技术与装备教育部工程研究中心 重庆400054; 3.重庆理工大学 时栅传感及先进检测技术重庆市重点实验室重庆400054; 4.重庆理工大学电气与电子工程学院重庆400054

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TH712

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国家自然科学基金项目(52175454)、重庆市自然科学基金面上项目(CSTB2023NSCQ-MSX0382)资助


Single-code-track linear time-grating displacement sensor with multi-frequency magnetic-field coupling
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1.School of Mechanical Engineering, Chongqing University of Technology, Chongqing 400054, China; 2.Engineering Research Center of Mechanical Testing Technology and Equipment of Ministry of Education, Chongqing University of Technology, Chongqing 400054, China; 3.Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology, Chongqing University of Technology, Chongqing 400054, China; 4.School of Electrical and Electronic Engineering, Chongqing University of Technology, Chongqing 400054, China

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    摘要:

    针对绝对式直线位移测量中双码道结构占用空间大、多感应通道幅相匹配误差易累积、以及紧凑安装条件下感应信号幅值低和信噪比不足等问题,提出了一种多频磁场耦合的单码道绝对式直线时栅位移传感器的设计方案。该传感器将粗、精测量单元集成于同一码道空间,采用双匝组合型激励线圈结构增强安装气隙内法向磁感应强度,并通过粗、精码道分时激励、非工作码道接地和外差降频处理实现绝对位移解算。首先,建立平面线圈瞬态磁场耦合模型,以平均法向磁感应强度、磁场标准差和归一化均匀性指标评价不同结构的线圈磁场分布特征;随后,基于对极数互质原理构建传感器模型,并对幅值不相等、空间正交偏差及磁场谐波等引起的周期误差进行分析;最后,通过有限元仿真和样机实验验证并测试传感器性能。仿真结果表明,双匝组合型激励线圈结构较传统时栅激励线圈结构平均法向磁感应强度提高21.26%,有利于提高感应信号幅值和信噪比。实验结果表明,传感器在206.4 mm有效测量范围内能够实现绝对位移测量,分辨力约为0.17 μm;在0.5 mm最佳安装气隙下,对极内误差峰峰值为5.63 μm,满量程误差峰峰值为6.42 μm。该传感器具有结构紧凑、感应通道少和工程实现性强等特点,可为小型化高精度绝对直线位移测量提供一种新的可行方案。

    Abstract:

    To address the issues in absolute linear displacement measurement where dual-track structures require a large installation space, amplitudephase matching errors among multiple sensing channels tend to accumulate, and induced signal amplitude and signal-to-noise ratio are insufficient under compact installation conditions, a design scheme for a single-track absolute linear time-grating displacement sensor based on multi-frequency magnetic field coupling is proposed. The sensor integrates coarse and fine measurement units within the same track space, employs a dual-turn combined excitation coil structure to enhance the normal magnetic flux density within the installation air gap, and realizes absolute displacement calculation through time-division excitation of the coarse and fine code tracks, grounding of the non-working code track, and heterodyne frequency-downconversion processing. First, a transient magnetic field coupling model of planar coils is established, and the magnetic field distribution characteristics of different coil structures are evaluated using the average normal magnetic flux density, magnetic field standard deviation, and normalized uniformity index. Subsequently, a sensor model is constructed based on the principle of relatively prime pole-pair numbers, and periodic errors caused by unequal amplitudes, spatial quadrature deviations, and magnetic field harmonics are analyzed. Finally, finite element simulations and prototype experiments are conducted to verify and evaluate sensor performance. Simulation results show that, compared with the conventional time-grating excitation coil structure, the dual-turn combined excitation coil structure increases the average normal magnetic flux density by 21.26%, which is beneficial for increasing the signal amplitude and improving the signal-to-noise ratio. Experimental results demonstrate that the sensor can achieve absolute displacement measurement within an effective measuring range of 206.4 mm, with a resolution of approximately 0.17 μm. Under the optimal installation air gap of 0.5 mm, the peak-to-peak error within one pole pair is 5.63 μm, and the full-scale peak-to-peak error is 6.42 μm. Featuring a compact structure, fewer sensing channels, and strong engineering practicality, the sensor provides a novel and practical solution for miniaturized high-precision absolute linear displacement measurement.

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杨继森,潘英庆,莫德维,王忠成,张静.多频磁场耦合的单码道绝对式直线时栅位移传感器[J].仪器仪表学报,2026,47(7):56-71

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  • 在线发布日期: 2026-09-24
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