基于随机森林和时频分析的激光自混合干涉微位移测量研究
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1.集美大学理学院物理系厦门361021; 2.厦门大学电子科学与技术学院厦门361102; 3.厦门大学萨本栋微米纳米科学技术研究院厦门361102

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TH741 TH822

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福建省自然科学基金(2025J01878)、厦门市产学研(2024CXY0112)项目资助


Research on laser self-mixing interference micro-displacement measurement based on random forest and time-frequency analysis
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1.Department of Physics, School of Science, Jimei University, Xiamen 361021, China; 2.School of Electronic Science and Engineering, Xiamen University, Xiamen 361102, China; 3.Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361102, China

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    摘要:

    为解决激光自混合干涉(SMI)测量系统在弱光反馈下方向信息提取困难的问题,提出一种基于随机森林(RF)与时频协同处理的方向提取与位移重构方法。首先,通过奇异值分解(SVD)方法对由LK模型生成的自混合信号进行去噪处理,对处理后的信号进行条纹谷值检测识别,并将信号分段成各单根条纹进行重采样。构建单个条纹的完整采样点作为特征集,利用随机森林模型学习条纹形态与运动方向的映射关系,稳健地获取目标运动的方向信息。训练好的模型对验证集和测试集的识别准确率分别为97.99%和98.99%,具有良好的泛化性能和鲁棒性。在此基础上,利用短时傅里叶变换(STFT)获得自混合干涉信号的时频谱,并结合随机森林模型得到的方向信息,提取出带方向信息的时频脊线,进而通过瞬时速度积分实现对目标运动位移的精确重构。仿真验证了该方法在含噪以及极弱光反馈和变光反馈强度情况下的重构性能。最后,搭建实验系统进行测量,实验结果表明对于非合作振动目标的位移重构误差为28.6 nm。该方法有效解决了传统算法中在弱光反馈下的方向判断难题,同时避免了需对系统参数进行精确估计的繁琐过程,尤其适用于弱光反馈以及真实可变光反馈情形下的微位移测量,对推进激光自混合干涉技术在纳米领域的非接触精密测量提供一种有效的技术路径。

    Abstract:

    To address the challenge of extracting directional information in laser self-mixing interference (SMI) systems under the weak optical feedback regime, this paper proposes a novel method that integrates a random forest (RF) model with time-frequency synergistic processing for direction extraction and displacement reconstruction. First, the SMI signal generated by the Lang-Kobayashi model is denoised using singular value decomposition (SVD). Subsequently, fringe valley detection and identification are performed, and the signal is segmented into individual fringes for resampling. The full set of sampling points of each resampled fringe is constructed as a feature set, and an RF model is trained to learn the mapping between fringe morphology and motion direction, thereby robustly acquiring directional information. The trained RF model achieves classification accuracies of 97.99% and 98.99% on the validation and test sets, respectively, demonstrating strong generalization and robustness. Subsequently, the short-time Fourier transform (STFT) is applied to obtain the time-frequency spectrum of the SMI signal. Combined with the directional information provided by the RF model, a direction-encoded time-frequency ridge is extracted. On this basis, the target displacement is precisely reconstructed via instantaneous velocity integration. Numerical simulations verify the reconstruction performance under noisy conditions, extremely weak optical feedback, and varying optical feedback conditions. Finally, an experimental system is established, and the measurement results show that a displacement reconstruction error of 28.6 nm is achieved for a non-cooperative vibrating target. The proposed method effectively resolves the direction ambiguity challenge under weak feedback that limits traditional algorithms, while also circumventing the need for precise estimation of system parameters. It is particularly suitable for micro-displacement measurement under weak and time-varying optical feedback conditions, providing an effective technical pathway for advancing nanoscale non-contact precision measurement using SMI technology.

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王秀琳,肖贺,戴佳俊,黄文财,刘暾东.基于随机森林和时频分析的激光自混合干涉微位移测量研究[J].仪器仪表学报,2026,47(7):14-24

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  • 在线发布日期: 2026-09-24
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